4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Patrick A. Kearney

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Ion beam collimating grid to reduce added defects

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Method for measuring and controlling beam current in ion...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2572848

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