4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Processes of growth from liquid or supercritical state
  6. Having pulling during growth

Oleg V. Kononchuk

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Apparatus and method for reducing bow and warp in silicon...

Stone working – Sawing – Reciprocating
Reexamination Certificate

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Growth of epitaxial semiconductor material with improved...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with preceding...
Reexamination Certificate

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Growth of epitaxial semiconductor material with improved...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with preceding...
Reexamination Certificate

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Growth of epitaxial semiconductor material with improved...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – With decomposition of a precursor
Reexamination Certificate

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High resistivity silicon wafer and method of producing same...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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