4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Noboru Kuriyama

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Method of detecting an arc in a glow-discharge device and...

Electric lamp and discharge devices: systems – Pulsating or a.c. supply – Discharge control discharge device load
Reexamination Certificate

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Method of detecting an arc in a glow-discharge device and...

Electric lamp and discharge devices: systems – Current and/or voltage regulation
Reexamination Certificate

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Method of detecting an arc in a glow-discharge device and...

Electric lamp and discharge devices: systems – With radiant energy sensitive control means – Radiant energy responsive load device
Reexamination Certificate

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Microwave generator apparatus comprising controller for automati

Electric lamp and discharge devices: systems – With cathode or cathode heater supply circuit
Patent

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Power supply apparatus for sputtering and a sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-622600

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