4. Semiconductor device manufacturing: process
  5. With measuring or testing

Nital Patel

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Method for controlling a critical dimension (CD) in an etch...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Method of estimation of wafer polish rates

Data processing: measuring – calibrating – or testing – Measurement system
Reexamination Certificate

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Method of estimation of wafer-to-wafer thickness

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2628424

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