4. Optics: measuring and testing
  5. By configuration comparison
  6. With comparison to master, desired shape, or reference voltage

Nippon Jidoseigyo Ltd.

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Apparatus for detecting defects in patterns

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Apparatus for detecting defects in patterns

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Image pick-up apparatus

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
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