4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Electrolytic

Nils Kummer

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Device for one-sided etching of a semiconductor wafer

Chemistry: electrical and wave energy – Apparatus – Electrolytic
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Method for producing three-dimensional structures by means...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1981069

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