4. Heat exchange
  5. With timer, programmer, time delay, or condition responsive...
  6. Having heating and cooling capability

Myeon-Chang Sung

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Apparatus and method for dry cleaning of substrates using...

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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Temperature-Humidity controller for semiconductor equipment...

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2028118

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