4. Abrading
  5. Work holder
  6. Work rotating

Mosel Vitelic Inc

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Deep trench bottle-shaped etch in centura mark II NG

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Polishing machine

Abrading – Work holder – Work rotating
Patent

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Shallow trench isolation method for a semiconductor wafer

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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