4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Pretreatment of substrate or post-treatment of coated substrate

Mohan Bhan

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Chemical vapor deposition hardware and process

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Film to tie up loose fluorine in the chamber after a clean proce

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Patent

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Film to tie up loose fluorine in the chamber after a clean...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1111407

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