4. Drying and gas or vapor contact with solids
  5. Apparatus
  6. With apparatus using centrifugal force

Mitsunao Shibasaki

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Apparatus and method for processing substrate

Coating apparatus – Solid applicator contacting work – With work-handling or work-supporting
Reexamination Certificate

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Spin dryer apparatus

Drying and gas or vapor contact with solids – Apparatus – With apparatus using centrifugal force
Patent

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Spraying device

Fluid sprinkling – spraying – and diffusing – Unitary plural outlet means – Plural outlets each supplied by different fluid
Patent

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Thin-film deposition apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Vapor feed supply system

Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Patent

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Profile ID: LFUS-PAI-P-898634

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