4. Pumps
  5. Electrical or getter type

Miriam Spagnol

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Corrugated style anode element for ion pumps

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Sputter ion pump

Pumps – Electrical or getter type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2065715

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