4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Michiko Nishiwaki

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Substrate processing apparatus and semiconductor device...

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Substrate processing apparatus and semiconductor device...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Substrate processing apparatus and substrate processing method

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2052313

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