4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Michael Junghähnel

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Method of producing a thin-film system

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Reexamination Certificate

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Process and system for operating magnetron discharges

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2453912

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