4. Electric lamp and discharge devices: systems
  5. Discharge device load with fluent material supply to the...
  6. Plasma generating

Michael Grapperhaus

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Immersed inductively—coupled plasma source

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Reexamination Certificate

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Inductively-coupled plasma processing system

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Ionized PVD with sequential deposition and etching

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2433380

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