4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Michael E. Barsky

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Automated spray cleaning apparatus for semiconductor wafers

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Enhancement mode device

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor
Reexamination Certificate

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Fully relaxed channel HEMT device

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor
Reexamination Certificate

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Method for determining etch depth

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Partially relaxed channel HEMT device

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2038667

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