4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Matthew Peter Dobson

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Ion sources for ion implantation apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion sources for ion implantation apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method of implanting a substrate and an ion implanter for...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with preceding...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2753332

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