4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Matthew Goodman

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Wafer support system

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
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Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Wafer support system

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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