4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Matthew C. Nielsen

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Anisotropic dry etching technique for deep bulk silicon etching

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Microelectromechanical high pressure gas microvalve

Valves and valve actuation – Heat or buoyancy motor actuated
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Profile ID: LFUS-PAI-P-2695142

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