4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means

Masahiro Saita

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Low-pressure mercury resonance radiation source

Coherent light generators – Particular beam control device – Having particular beam control circuit component
Patent

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Multiple-imaging charged particle-beam exposure system

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Profile ID: LFUS-PAI-P-864718

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