4. Radiant energy
  5. Irradiation of objects or material
  6. Ion or electron beam irradiation

Masahiro Kiga

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Electron beam irradiation apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Method and apparatus for electron beam irradiation

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2526446

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