4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Liquid phase etching

Mary Conroy Bushey

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Cobalt disilicide structure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Wet cleans for cobalt disilicide processing

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2472286

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