4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Markku Ylilammi

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Method of producing a piezoelectric thin film and bulk...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Resonator structure and a filter comprising such a resonator...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
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Resonator structure having a dampening material and a filter...

Wave transmission lines and networks – Coupling networks – Electromechanical filter
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Profile ID: LFUS-PAI-P-2661959

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