4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Marian Zielinski

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Magnetic device for rotating a substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Multiple single-wafer loadlock wafer processing apparatus and lo

Metal working – Barrier layer or semiconductor device making
Patent

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Transport system for wafer processing line

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1244150

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