4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Brushing

Marc Mattaroccia

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Apparatus and method for wafer cleaning

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Reexamination Certificate

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Wafer cleaning apparatus

Brushing – scrubbing – and general cleaning – Machines – Brushing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2468826

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