4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Mamoru Sueyoshi

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Apparatus and method for use in manufacturing a...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Apparatus and method for use in manufacturing a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Substrate processing apparatus and substrate processing method

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2052314

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