4. Radiant energy
  5. Ion generation
  6. Field ionization type

Lu-Chang Chen

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Apparatus for calibrating the position of a wafer platform...

Metal working – Means to assemble or disassemble – Means to assemble electrical device
Reexamination Certificate

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Method and apparatus for avoiding driver gas contamination...

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Method reducing the effects of N2 gas contamination in an...

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2610657

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