4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Lori A. Callaghan

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Silicon carbide sleeve for substrate support assembly

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer carrier

Heating – Having timing – programming or cycling control means – Of handling or treatment of discrete work batch or unit
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2154322

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