4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Lisa Kiloay

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Method of forming gate electrode in semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method using a photoresist residue

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Polishing polymer surfaces on non-porous CMP pads

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2060920

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