4. Coating apparatus
  5. Work holders, or handling devices

Larry S. Wingo

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Long tooth rails for semiconductor wafer carriers

Supports: racks – Special article – Platelike
Reexamination Certificate

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Method of making a silicon carbide rail for use in a...

Metal working – Method of mechanical manufacture – Shaping one-piece blank by removing material
Reexamination Certificate

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Rotatable sputter target

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Vertical semiconductor wafer carrier

Coating apparatus – Work holders – or handling devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2109668

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