4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Larry R. Lane

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High magnesium content copper magnesium alloys as diffusion...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Rapid thermal CVD apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-1845856

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