4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With radio frequency antenna or inductive coil gas...

Lam Research Corp.

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Apparatus and method for creating an ultra-clean...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
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Apparatus and method for radio frequency de-coupling and...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Inductively coupled plasma etching apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Method and system for detecting an exposure of a material on...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Methods for making reinforced wafer polishing pads utilizing...

Abrading – Flexible-member tool – per se
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