4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Kyung Sik Shim

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Apparatus for fabricating a semiconductor device

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Semiconductor device manufacturing apparatus having...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Single wafer LPCVD apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2645582

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