4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Koukou Suu

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Device and method for manufacturing thin films

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Etching method and system

Electric heating – Metal heating – By arc
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High temperature deposition of Pt/TiOx for bottom electrodes

Coating processes – Electrical product produced – Condenser or capacitor
Reexamination Certificate

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Mixer, and device and method for manufacturing thin-film

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2681263

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