4. Abrading
  5. Machine
  6. Rotary tool

Kohzo Abe

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Double side grinding apparatus and double side polishing apparat

Abrading – Machine – Rotary tool
Patent

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Flattening machine

Abrading – Machine – Rotary tool
Reexamination Certificate

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Optical apparatus for measuring profiles of a wafer

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Optical instrument for measuring shape of wafer

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1153847

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