4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Kevin C. Stark

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Capacitive differential pressure sensor with coupled diaphragms

Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate

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Flexible silicon strain gage

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Fracture-resistant micromachined devices

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2048654

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