4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Using film of etchant between a stationary surface and a...

Kenneth Morgan Davis

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Chemical-mechanical polishing system having a bi-material...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Chemical-mechanical polishing system having a bi-material...

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
Reexamination Certificate

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Slurry for mechanical polishing (CMP) of metals and use thereof

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate

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