4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Kenichiro Togoe

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Electrostatic chuck member and method of producing the same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Spray-coated member having an excellent resistance to plasma...

Stock material or miscellaneous articles – Structurally defined web or sheet – Continuous and nonuniform or irregular surface on layer or...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2750203

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