4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Brushing

Kazuhiko Gommori

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Apparatus and method for processing a substrate

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate

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Disk washing apparatus

Brushing – scrubbing – and general cleaning – Machines – Brushing
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Drying apparatus for a substrate and drying method thereof

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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Method and apparatus for drying substrate plates

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
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Method and apparatus for treating surface of substrate plate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-457157

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