4. Coating apparatus
  5. Gas or vapor deposition

Jung-il An

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Chemical vapor deposition apparatus for manufacturing...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Chemical vapor deposition apparatus for manufacturing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Chemical vapor deposition method for manufacturing...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2060025

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