4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal

Joseph Wytman

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Compliant wafer chuck

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Method of processing a wafer using a compliant wafer chuck

Coating processes – Electrical product produced – Metal coating
Reexamination Certificate

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Two-piece chuck

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2100788

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