4. Supports: racks
  5. Special article
  6. Platelike

Joseph A. Kraus

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Integral facet cryopump, water vapor pump, or high vacuum pump

Refrigeration – Storage of solidified or liquified gas – Liquified gas transferred as liquid
Reexamination Certificate

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Wafer transfer cassette

Supports: racks – Special article – Platelike
Patent

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Profile ID: LFUS-PAI-P-1819921

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