4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Josef Hirtreiter

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Manufacturing method for a micromechanical device

Etching a substrate: processes – Etching of semiconductor material to produce an article...
Reexamination Certificate

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Method for designing and manufacturing a micromechanical device

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2088505

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