4. Drying and gas or vapor contact with solids
  5. Process
  6. Gas or vapor contact with treated material

Jonathan E. Borkowski

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Modular frame for a wafer fabrication system

Material or article handling – Associated with semiconductor wafer handling – Including wafer charging or discharging means for vacuum...
Reexamination Certificate

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Wafer drying apparatus and method

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2592806

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