4. Semiconductor device manufacturing: process
  5. Miscellaneous

John Z. Pastalan

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Method for producing devices having piezoelectric films

Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate

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Method for producing devices having piezoelectric films

Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate

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Method of deposition of films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Selective etching of thin films

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2125117

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