4. Coating apparatus
  5. Gas or vapor deposition

John Ruffell

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Backside gas delivery system for a semiconductor wafer...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Determining beam alignment in ion implantation using...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Ion implanter and beam stop therefor

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for processing wafers

Material or article handling – Apparatus for moving material between zones having different...
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Method and apparatus for processing wafers

Material or article handling – Horizontally swinging load support – Swinging about pivot
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Profile ID: LFUS-PAI-P-2055183

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