4. Refrigeration
  5. Low pressure cold trap process and apparatus

John Egermeier

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Gas processing techniques

Refrigeration – Low pressure cold trap process and apparatus
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Method for superior step coverage and interface control for...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Target misalignment detector

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-2044722

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