4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting

Joel O'Don Stevenson

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Method & apparatus for monitoring plasma processing...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and apparatus for monitoring plasma processing...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method and apparatus for monitoring plasma processing...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Method and apparatus for monitoring plasma processing...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Method and apparatus for monitoring plasma processing...

Coating apparatus – Gas or vapor deposition – With treating means
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