4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With radio frequency antenna or inductive coil gas...

Jin-Yuan Chen

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Process chamber having a voltage distribution electrode

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Pulsed RF power delivery for plasma processing

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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