4. Metal working
  5. Barrier layer or semiconductor device making

Jia Rong Chen

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Apparatus and method for servicing a wafer platform

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate

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Method for preventing corrosion in load-lock chambers

Metal working – Barrier layer or semiconductor device making
Patent

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Profile ID: LFUS-PAI-P-1338476

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