4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Angular rate using gyroscopic or coriolis effect

Ji Man Cho

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Micro inertia sensor and method of manufacturing the same

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Micro inertia sensor and method of manufacturing the same

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
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